Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering
Descripción del Articulo
This work was funded by the Peruvian science foundation FONDECYT under the projects “Círculos de investigación en ciencia y tecnología-2”, contract number 011-2014 and under the cooperation project with the German academic exchange service (DAAD), contract number 035-2016. The authors also gratefull...
| Autores: | , , , , , , , , |
|---|---|
| Formato: | objeto de conferencia |
| Fecha de Publicación: | 2017 |
| Institución: | Consejo Nacional de Ciencia Tecnología e Innovación |
| Repositorio: | CONCYTEC-Institucional |
| Lenguaje: | inglés |
| OAI Identifier: | oai:repositorio.concytec.gob.pe:20.500.12390/583 |
| Enlace del recurso: | https://hdl.handle.net/20.500.12390/583 https://doi.org/10.4028/www.scientific.net/MSF.890.299 |
| Nivel de acceso: | acceso abierto |
| Materia: | X ray diffraction analysis Aluminum Aluminum coatings Aluminum nitride Annealing Cathodoluminescence Heat treatment Light Light emission Luminescence Luminescence of inorganic solids Nitrides Radio waves Rapid thermal processing Rare earths Terbium Thin films Wide band gap semiconductors Aluminum nitride thin films Annealing techniques Energy dispersive x-ray Luminescence properties Photo-luminescence excitation Post annealing treatment Post deposition annealing Radio frequency magnetron sputtering Magnetron sputtering https://purl.org/pe-repo/ocde/ford#1.03.01 |
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4689 |
| dc.title.none.fl_str_mv |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| title |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| spellingShingle |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering Tucto Salinas K.Y. X ray diffraction analysis Aluminum Aluminum coatings Aluminum nitride Annealing Cathodoluminescence Heat treatment Light Light emission Luminescence Luminescence of inorganic solids Nitrides Radio waves Rapid thermal processing Rare earths Terbium Thin films Wide band gap semiconductors Aluminum nitride thin films Annealing techniques Energy dispersive x-ray Luminescence properties Photo-luminescence excitation Post annealing treatment Post deposition annealing Radio frequency magnetron sputtering Magnetron sputtering https://purl.org/pe-repo/ocde/ford#1.03.01 |
| title_short |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| title_full |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| title_fullStr |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| title_full_unstemmed |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| title_sort |
Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering |
| author |
Tucto Salinas K.Y. |
| author_facet |
Tucto Salinas K.Y. Flores Escalante L.F. Guerra Torres J.A. Grieseler R. Kups T. Pezoldt J. Osvet A. Batentschuk M. Weingärtner R. |
| author_role |
author |
| author2 |
Flores Escalante L.F. Guerra Torres J.A. Grieseler R. Kups T. Pezoldt J. Osvet A. Batentschuk M. Weingärtner R. |
| author2_role |
author author author author author author author author |
| dc.contributor.author.fl_str_mv |
Tucto Salinas K.Y. Flores Escalante L.F. Guerra Torres J.A. Grieseler R. Kups T. Pezoldt J. Osvet A. Batentschuk M. Weingärtner R. |
| dc.subject.none.fl_str_mv |
X ray diffraction analysis |
| topic |
X ray diffraction analysis Aluminum Aluminum coatings Aluminum nitride Annealing Cathodoluminescence Heat treatment Light Light emission Luminescence Luminescence of inorganic solids Nitrides Radio waves Rapid thermal processing Rare earths Terbium Thin films Wide band gap semiconductors Aluminum nitride thin films Annealing techniques Energy dispersive x-ray Luminescence properties Photo-luminescence excitation Post annealing treatment Post deposition annealing Radio frequency magnetron sputtering Magnetron sputtering https://purl.org/pe-repo/ocde/ford#1.03.01 |
| dc.subject.es_PE.fl_str_mv |
Aluminum Aluminum coatings Aluminum nitride Annealing Cathodoluminescence Heat treatment Light Light emission Luminescence Luminescence of inorganic solids Nitrides Radio waves Rapid thermal processing Rare earths Terbium Thin films Wide band gap semiconductors Aluminum nitride thin films Annealing techniques Energy dispersive x-ray Luminescence properties Photo-luminescence excitation Post annealing treatment Post deposition annealing Radio frequency magnetron sputtering Magnetron sputtering |
| dc.subject.ocde.none.fl_str_mv |
https://purl.org/pe-repo/ocde/ford#1.03.01 |
| description |
This work was funded by the Peruvian science foundation FONDECYT under the projects “Círculos de investigación en ciencia y tecnología-2”, contract number 011-2014 and under the cooperation project with the German academic exchange service (DAAD), contract number 035-2016. The authors also gratefully acknowledge the support of Karem Tucto and Loreleyn Flores by CONCYTEC under the contract numbers 012-2013-FONDECYT and 000236-2015-FONDECYTDE, respectivley. |
| publishDate |
2017 |
| dc.date.accessioned.none.fl_str_mv |
2024-05-30T23:13:38Z |
| dc.date.available.none.fl_str_mv |
2024-05-30T23:13:38Z |
| dc.date.issued.fl_str_mv |
2017 |
| dc.type.none.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
| format |
conferenceObject |
| dc.identifier.isbn.none.fl_str_mv |
9783035710281 |
| dc.identifier.uri.none.fl_str_mv |
https://hdl.handle.net/20.500.12390/583 |
| dc.identifier.doi.none.fl_str_mv |
https://doi.org/10.4028/www.scientific.net/MSF.890.299 |
| dc.identifier.scopus.none.fl_str_mv |
2-s2.0-85016419055 |
| identifier_str_mv |
9783035710281 2-s2.0-85016419055 |
| url |
https://hdl.handle.net/20.500.12390/583 https://doi.org/10.4028/www.scientific.net/MSF.890.299 |
| dc.language.iso.none.fl_str_mv |
eng |
| language |
eng |
| dc.relation.ispartof.none.fl_str_mv |
Materials Science Forum |
| dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess |
| eu_rights_str_mv |
openAccess |
| dc.publisher.none.fl_str_mv |
Trans Tech Publications Ltd |
| publisher.none.fl_str_mv |
Trans Tech Publications Ltd |
| dc.source.none.fl_str_mv |
reponame:CONCYTEC-Institucional instname:Consejo Nacional de Ciencia Tecnología e Innovación instacron:CONCYTEC |
| instname_str |
Consejo Nacional de Ciencia Tecnología e Innovación |
| instacron_str |
CONCYTEC |
| institution |
CONCYTEC |
| reponame_str |
CONCYTEC-Institucional |
| collection |
CONCYTEC-Institucional |
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Repositorio Institucional CONCYTEC |
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repositorio@concytec.gob.pe |
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1844883106941632512 |
| spelling |
Publicationrp01105600rp01108600rp01109600rp01106600rp01102600rp01104600rp01107600rp01103600rp00714500Tucto Salinas K.Y.Flores Escalante L.F.Guerra Torres J.A.Grieseler R.Kups T.Pezoldt J.Osvet A.Batentschuk M.Weingärtner R.2024-05-30T23:13:38Z2024-05-30T23:13:38Z20179783035710281https://hdl.handle.net/20.500.12390/583https://doi.org/10.4028/www.scientific.net/MSF.890.2992-s2.0-85016419055This work was funded by the Peruvian science foundation FONDECYT under the projects “Círculos de investigación en ciencia y tecnología-2”, contract number 011-2014 and under the cooperation project with the German academic exchange service (DAAD), contract number 035-2016. The authors also gratefully acknowledge the support of Karem Tucto and Loreleyn Flores by CONCYTEC under the contract numbers 012-2013-FONDECYT and 000236-2015-FONDECYTDE, respectivley.Terbium-doped aluminum nitride thin films have been deposited by radio frequency magnetron sputtering. The influence of annealing treatments on structural, morphological and luminescence properties of the films is examined with the aim to optimize post-deposition annealing conditions. Temperatures starting from 500 up to 1000°C using two annealing techniques were investigated: rapid thermal processing and quartz tube furnace. X-ray diffraction analysis revealed the formation of aluminum oxide and aluminum oxynitride phases at temperatures higher than 750°C. The oxygen content in the surface layer was measured with energy dispersive X-ray. The terbium emission was obtained after excitation either by photons or electrons. The films treated with rapid thermal processing at 750°C resulted in the highest emission.Consejo Nacional de Ciencia, Tecnología e Innovación Tecnológica - ConcytecengTrans Tech Publications LtdMaterials Science Foruminfo:eu-repo/semantics/openAccessX ray diffraction analysisAluminum-1Aluminum coatings-1Aluminum nitride-1Annealing-1Cathodoluminescence-1Heat treatment-1Light-1Light emission-1Luminescence-1Luminescence of inorganic solids-1Nitrides-1Radio waves-1Rapid thermal processing-1Rare earths-1Terbium-1Thin films-1Wide band gap semiconductors-1Aluminum nitride thin films-1Annealing techniques-1Energy dispersive x-ray-1Luminescence properties-1Photo-luminescence excitation-1Post annealing treatment-1Post deposition annealing-1Radio frequency magnetron sputtering-1Magnetron sputtering-1https://purl.org/pe-repo/ocde/ford#1.03.01-1Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputteringinfo:eu-repo/semantics/conferenceObjectreponame:CONCYTEC-Institucionalinstname:Consejo Nacional de Ciencia Tecnología e Innovacióninstacron:CONCYTEC#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#20.500.12390/583oai:repositorio.concytec.gob.pe:20.500.12390/5832024-05-30 15:22:15.292http://purl.org/coar/access_right/c_14cbinfo:eu-repo/semantics/closedAccessmetadata only accesshttps://repositorio.concytec.gob.peRepositorio Institucional CONCYTECrepositorio@concytec.gob.pe#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="5a773ac6-d7ac-4c28-a45a-37ecc55ad9e3"> <Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type> <Language>eng</Language> <Title>Effect of post-annealing treatment on the structure and luminescence properties of AIN: Tb 3+ thin films prepared by radio frequency magnetron sputtering</Title> <PublishedIn> <Publication> <Title>Materials Science Forum</Title> </Publication> </PublishedIn> <PublicationDate>2017</PublicationDate> <DOI>https://doi.org/10.4028/www.scientific.net/MSF.890.299</DOI> <SCP-Number>2-s2.0-85016419055</SCP-Number> <ISBN>9783035710281</ISBN> <Authors> <Author> <DisplayName>Tucto Salinas K.Y.</DisplayName> <Person id="rp01105" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Flores Escalante L.F.</DisplayName> <Person id="rp01108" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Guerra Torres J.A.</DisplayName> <Person id="rp01109" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Grieseler R.</DisplayName> <Person id="rp01106" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Kups T.</DisplayName> <Person id="rp01102" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Pezoldt J.</DisplayName> <Person id="rp01104" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Osvet A.</DisplayName> <Person id="rp01107" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Batentschuk M.</DisplayName> <Person id="rp01103" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Weingärtner R.</DisplayName> <Person id="rp00714" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> </Authors> <Editors> </Editors> <Publishers> <Publisher> <DisplayName>Trans Tech Publications Ltd</DisplayName> <OrgUnit /> </Publisher> </Publishers> <Keyword>X ray diffraction analysis</Keyword> <Keyword>Aluminum</Keyword> <Keyword>Aluminum coatings</Keyword> <Keyword>Aluminum nitride</Keyword> <Keyword>Annealing</Keyword> <Keyword>Cathodoluminescence</Keyword> <Keyword>Heat treatment</Keyword> <Keyword>Light</Keyword> <Keyword>Light emission</Keyword> <Keyword>Luminescence</Keyword> <Keyword>Luminescence of inorganic solids</Keyword> <Keyword>Nitrides</Keyword> <Keyword>Radio waves</Keyword> <Keyword>Rapid thermal processing</Keyword> <Keyword>Rare earths</Keyword> <Keyword>Terbium</Keyword> <Keyword>Thin films</Keyword> <Keyword>Wide band gap semiconductors</Keyword> <Keyword>Aluminum nitride thin films</Keyword> <Keyword>Annealing techniques</Keyword> <Keyword>Energy dispersive x-ray</Keyword> <Keyword>Luminescence properties</Keyword> <Keyword>Photo-luminescence excitation</Keyword> <Keyword>Post annealing treatment</Keyword> <Keyword>Post deposition annealing</Keyword> <Keyword>Radio frequency magnetron sputtering</Keyword> <Keyword>Magnetron sputtering</Keyword> <Abstract>Terbium-doped aluminum nitride thin films have been deposited by radio frequency magnetron sputtering. The influence of annealing treatments on structural, morphological and luminescence properties of the films is examined with the aim to optimize post-deposition annealing conditions. Temperatures starting from 500 up to 1000°C using two annealing techniques were investigated: rapid thermal processing and quartz tube furnace. X-ray diffraction analysis revealed the formation of aluminum oxide and aluminum oxynitride phases at temperatures higher than 750°C. The oxygen content in the surface layer was measured with energy dispersive X-ray. The terbium emission was obtained after excitation either by photons or electrons. The films treated with rapid thermal processing at 750°C resulted in the highest emission.</Abstract> <Access xmlns="http://purl.org/coar/access_right" > </Access> </Publication> -1 |
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13.434648 |
Nota importante:
La información contenida en este registro es de entera responsabilidad de la institución que gestiona el repositorio institucional donde esta contenido este documento o set de datos. El CONCYTEC no se hace responsable por los contenidos (publicaciones y/o datos) accesibles a través del Repositorio Nacional Digital de Ciencia, Tecnología e Innovación de Acceso Abierto (ALICIA).
La información contenida en este registro es de entera responsabilidad de la institución que gestiona el repositorio institucional donde esta contenido este documento o set de datos. El CONCYTEC no se hace responsable por los contenidos (publicaciones y/o datos) accesibles a través del Repositorio Nacional Digital de Ciencia, Tecnología e Innovación de Acceso Abierto (ALICIA).
