Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron

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To obtain spectra of a light emitting substrate during the deposition of Terbium (Tb) doped thin films by RF magnetron sputtering, an optomechanical device is developed, constructed and tested. The device is required to enable spatial scans of the substrate plane and the plasma beneath. Thereby, mea...

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Detalles Bibliográficos
Autor: Andreas Lich, Julian
Formato: tesis de maestría
Fecha de Publicación:2017
Institución:Pontificia Universidad Católica del Perú
Repositorio:PUCP-Tesis
Lenguaje:inglés
OAI Identifier:oai:tesis.pucp.edu.pe:20.500.12404/9320
Enlace del recurso:http://hdl.handle.net/20.500.12404/9320
Nivel de acceso:acceso abierto
Materia:Optoelectrónica--Dispositivos electrónicos
Diseño de sistemas
https://purl.org/pe-repo/ocde/ford#2.00.00
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dc.title.es_ES.fl_str_mv Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
title Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
spellingShingle Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
Andreas Lich, Julian
Optoelectrónica--Dispositivos electrónicos
Diseño de sistemas
https://purl.org/pe-repo/ocde/ford#2.00.00
title_short Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
title_full Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
title_fullStr Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
title_full_unstemmed Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
title_sort Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
author Andreas Lich, Julian
author_facet Andreas Lich, Julian
author_role author
dc.contributor.advisor.fl_str_mv Theska, René
Weingärtner, Roland
dc.contributor.author.fl_str_mv Andreas Lich, Julian
dc.subject.es_ES.fl_str_mv Optoelectrónica--Dispositivos electrónicos
Diseño de sistemas
topic Optoelectrónica--Dispositivos electrónicos
Diseño de sistemas
https://purl.org/pe-repo/ocde/ford#2.00.00
dc.subject.ocde.es_ES.fl_str_mv https://purl.org/pe-repo/ocde/ford#2.00.00
description To obtain spectra of a light emitting substrate during the deposition of Terbium (Tb) doped thin films by RF magnetron sputtering, an optomechanical device is developed, constructed and tested. The device is required to enable spatial scans of the substrate plane and the plasma beneath. Thereby, measurements of spatial emission intensity distribution and a separation of the Tb spectrum from the plasma-overlain substrate spectrum shall be possible. After an introduction into theoretical and practical boundary conditions, the system’s requirements are specified, followed by a brief investigation of existing solutions for similar problems. A basic optical prototype system is introduced and analysed. After a discussion and evaluation of part solutions, an optomechanical system is developed, constructed, analysed and compared to the prototype system.
publishDate 2017
dc.date.accessioned.es_ES.fl_str_mv 2017-09-06T23:44:17Z
dc.date.available.es_ES.fl_str_mv 2017-09-06T23:44:17Z
dc.date.created.es_ES.fl_str_mv 2017
dc.date.issued.fl_str_mv 2017-09-06
dc.type.es_ES.fl_str_mv info:eu-repo/semantics/masterThesis
format masterThesis
dc.identifier.uri.none.fl_str_mv http://hdl.handle.net/20.500.12404/9320
url http://hdl.handle.net/20.500.12404/9320
dc.language.iso.es_ES.fl_str_mv eng
language eng
dc.relation.ispartof.fl_str_mv SUNEDU
dc.rights.es_ES.fl_str_mv info:eu-repo/semantics/openAccess
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eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-nd/2.5/pe/
dc.publisher.es_ES.fl_str_mv Pontificia Universidad Católica del Perú
dc.publisher.country.es_ES.fl_str_mv PE
dc.source.none.fl_str_mv reponame:PUCP-Tesis
instname:Pontificia Universidad Católica del Perú
instacron:PUCP
instname_str Pontificia Universidad Católica del Perú
instacron_str PUCP
institution PUCP
reponame_str PUCP-Tesis
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spelling Theska, RenéWeingärtner, RolandAndreas Lich, Julian2017-09-06T23:44:17Z2017-09-06T23:44:17Z20172017-09-06http://hdl.handle.net/20.500.12404/9320To obtain spectra of a light emitting substrate during the deposition of Terbium (Tb) doped thin films by RF magnetron sputtering, an optomechanical device is developed, constructed and tested. The device is required to enable spatial scans of the substrate plane and the plasma beneath. Thereby, measurements of spatial emission intensity distribution and a separation of the Tb spectrum from the plasma-overlain substrate spectrum shall be possible. After an introduction into theoretical and practical boundary conditions, the system’s requirements are specified, followed by a brief investigation of existing solutions for similar problems. A basic optical prototype system is introduced and analysed. After a discussion and evaluation of part solutions, an optomechanical system is developed, constructed, analysed and compared to the prototype system.Zur spektralen Analyse eines lichtemittierenden Substrates während des Beschichtungsprozesses von Terbium (Tb)-dotierten Dünnfilmen durch RF Magnetronsputtern wird ein optomechanisches Gerät entwickelt, konstruiert und getestet. Das Gerät soll räumliche Scans der Substratoberfläche und dem, sich darunter befindenden, Plasma ermöglichen. Räumliche Verteilungen der Emissionsintensit ät sollen dadurch messbar- und das Tb-Spektrum von dem plasmaüberlagerten Substratspektrum trennbar gemacht werden. Nach einer Einführung in die theoretischen- und praktischen Rahmenbedingungen erfolgt die Präzisierung der Aufgabenstellung und eine kurze Recherche zu bereits vorhandenen Lösungen von ähnlichen Problemen. Ein Prototyp wird vorgestellt und geprüft. Nach der Diskussion und Evaluierung von Teillösungen wird ein optomechanisches System entwickelt, konstruiert, analysiert und mit dem Prototyp verglichen.TesisengPontificia Universidad Católica del PerúPEinfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-nd/2.5/pe/Optoelectrónica--Dispositivos electrónicosDiseño de sistemashttps://purl.org/pe-repo/ocde/ford#2.00.00Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetroninfo:eu-repo/semantics/masterThesisreponame:PUCP-Tesisinstname:Pontificia Universidad Católica del Perúinstacron:PUCPSUNEDUMaestro en Ingeniería MecatrónicaMaestríaPontificia Universidad Católica del Perú. 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Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
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