Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering

Descripción del Articulo

Calderon would like to express her thanks to the Fondecyt project number 167-2015 (Concytec, Perú). Pujada express his thanks to the project number FC-F-3-2017, Vicerrectorado de Investigación (UNIPerú), and also to the Universidad de Chile and the Fondecyt Project 1110148 (Conicyt, Chile).
Detalles Bibliográficos
Autores: Calderon, NZ, Ampuero, JL, La Rosa-Toro, A, Pujada, BR
Formato: objeto de conferencia
Fecha de Publicación:2018
Institución:Consejo Nacional de Ciencia Tecnología e Innovación
Repositorio:CONCYTEC-Institucional
Lenguaje:inglés
OAI Identifier:oai:repositorio.concytec.gob.pe:20.500.12390/1091
Enlace del recurso:https://hdl.handle.net/20.500.12390/1091
https://doi.org/10.1088/1742-6596/1143/1/012027
Nivel de acceso:acceso abierto
Materia:substrate temperature
Silver-carbon
argon/acetylene plasma
properties of Ag-C films
https://purl.org/pe-repo/ocde/ford#1.03.00
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oai_identifier_str oai:repositorio.concytec.gob.pe:20.500.12390/1091
network_acronym_str CONC
network_name_str CONCYTEC-Institucional
repository_id_str 4689
dc.title.none.fl_str_mv Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
title Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
spellingShingle Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
Calderon, NZ
substrate temperature
Silver-carbon
argon/acetylene plasma
properties of Ag-C films
https://purl.org/pe-repo/ocde/ford#1.03.00
title_short Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
title_full Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
title_fullStr Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
title_full_unstemmed Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
title_sort Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
author Calderon, NZ
author_facet Calderon, NZ
Ampuero, JL
La Rosa-Toro, A
Pujada, BR
author_role author
author2 Ampuero, JL
La Rosa-Toro, A
Pujada, BR
author2_role author
author
author
dc.contributor.author.fl_str_mv Calderon, NZ
Ampuero, JL
La Rosa-Toro, A
Pujada, BR
dc.subject.none.fl_str_mv substrate temperature
topic substrate temperature
Silver-carbon
argon/acetylene plasma
properties of Ag-C films
https://purl.org/pe-repo/ocde/ford#1.03.00
dc.subject.es_PE.fl_str_mv Silver-carbon
argon/acetylene plasma
properties of Ag-C films
dc.subject.ocde.none.fl_str_mv https://purl.org/pe-repo/ocde/ford#1.03.00
description Calderon would like to express her thanks to the Fondecyt project number 167-2015 (Concytec, Perú). Pujada express his thanks to the project number FC-F-3-2017, Vicerrectorado de Investigación (UNIPerú), and also to the Universidad de Chile and the Fondecyt Project 1110148 (Conicyt, Chile).
publishDate 2018
dc.date.accessioned.none.fl_str_mv 2024-05-30T23:13:38Z
dc.date.available.none.fl_str_mv 2024-05-30T23:13:38Z
dc.date.issued.fl_str_mv 2018
dc.type.none.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
dc.identifier.uri.none.fl_str_mv https://hdl.handle.net/20.500.12390/1091
dc.identifier.doi.none.fl_str_mv https://doi.org/10.1088/1742-6596/1143/1/012027
dc.identifier.isi.none.fl_str_mv 467431100027
url https://hdl.handle.net/20.500.12390/1091
https://doi.org/10.1088/1742-6596/1143/1/012027
identifier_str_mv 467431100027
dc.language.iso.none.fl_str_mv eng
language eng
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
dc.rights.uri.none.fl_str_mv https://creativecommons.org/licenses/by/3.0/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by/3.0/
dc.publisher.none.fl_str_mv IOP
publisher.none.fl_str_mv IOP
dc.source.none.fl_str_mv reponame:CONCYTEC-Institucional
instname:Consejo Nacional de Ciencia Tecnología e Innovación
instacron:CONCYTEC
instname_str Consejo Nacional de Ciencia Tecnología e Innovación
instacron_str CONCYTEC
institution CONCYTEC
reponame_str CONCYTEC-Institucional
collection CONCYTEC-Institucional
repository.name.fl_str_mv Repositorio Institucional CONCYTEC
repository.mail.fl_str_mv repositorio@concytec.gob.pe
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spelling Publicationrp03102600rp03100600rp01042500rp03101600Calderon, NZAmpuero, JLLa Rosa-Toro, APujada, BR2024-05-30T23:13:38Z2024-05-30T23:13:38Z2018https://hdl.handle.net/20.500.12390/1091https://doi.org/10.1088/1742-6596/1143/1/012027467431100027Calderon would like to express her thanks to the Fondecyt project number 167-2015 (Concytec, Perú). Pujada express his thanks to the project number FC-F-3-2017, Vicerrectorado de Investigación (UNIPerú), and also to the Universidad de Chile and the Fondecyt Project 1110148 (Conicyt, Chile).Silver-carbon films (Ag-C), rich in silver, deposited by DC magnetron sputtering from a silver target (Ag) into silicon substrate (100) in atmosphere of argon/acetylene plasma, have been studied in function of the substrate temperature (as-deposited, 200°C and 300°C). The Ag-C films were obtained using an acetylene gas flow of 0.3 sccm and dc cathode current of 180mA. Ag-C films were characterized by X-ray diffraction, Raman spectroscopy and scanning electron microscopy. It has been observed the decrease of graphite-like bonds in the Ag-C films with the substrate temperature. The SEM revealed that the substrate temperature promotes changes on the surface morphology. These changes on the chemistry and surface morphology are discussed in terms of atoms diffusion on the surface and the chemical composition of the Ag-C films.Consejo Nacional de Ciencia, Tecnología e Innovación Tecnológica - ConcytecengIOPinfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/3.0/substrate temperatureSilver-carbon-1argon/acetylene plasma-1properties of Ag-C films-1https://purl.org/pe-repo/ocde/ford#1.03.00-1Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputteringinfo:eu-repo/semantics/conferenceObjectreponame:CONCYTEC-Institucionalinstname:Consejo Nacional de Ciencia Tecnología e Innovacióninstacron:CONCYTEC#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#20.500.12390/1091oai:repositorio.concytec.gob.pe:20.500.12390/10912024-05-30 15:36:26.652https://creativecommons.org/licenses/by/3.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_14cbinfo:eu-repo/semantics/closedAccessmetadata only accesshttps://repositorio.concytec.gob.peRepositorio Institucional CONCYTECrepositorio@concytec.gob.pe#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="ff5f08ff-26ba-4cf0-9576-95e443472ee8"> <Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type> <Language>eng</Language> <Title>Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering</Title> <PublishedIn> <Publication> </Publication> </PublishedIn> <PublicationDate>2018</PublicationDate> <DOI>https://doi.org/10.1088/1742-6596/1143/1/012027</DOI> <ISI-Number>467431100027</ISI-Number> <Authors> <Author> <DisplayName>Calderon, NZ</DisplayName> <Person id="rp03102" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Ampuero, JL</DisplayName> <Person id="rp03100" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>La Rosa-Toro, A</DisplayName> <Person id="rp01042" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> <Author> <DisplayName>Pujada, BR</DisplayName> <Person id="rp03101" /> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> </Authors> <Editors> </Editors> <Publishers> <Publisher> <DisplayName>IOP</DisplayName> <OrgUnit /> </Publisher> </Publishers> <License>https://creativecommons.org/licenses/by/3.0/</License> <Keyword>substrate temperature</Keyword> <Keyword>Silver-carbon</Keyword> <Keyword>argon/acetylene plasma</Keyword> <Keyword>properties of Ag-C films</Keyword> <Abstract>Silver-carbon films (Ag-C), rich in silver, deposited by DC magnetron sputtering from a silver target (Ag) into silicon substrate (100) in atmosphere of argon/acetylene plasma, have been studied in function of the substrate temperature (as-deposited, 200°C and 300°C). The Ag-C films were obtained using an acetylene gas flow of 0.3 sccm and dc cathode current of 180mA. Ag-C films were characterized by X-ray diffraction, Raman spectroscopy and scanning electron microscopy. It has been observed the decrease of graphite-like bonds in the Ag-C films with the substrate temperature. The SEM revealed that the substrate temperature promotes changes on the surface morphology. These changes on the chemistry and surface morphology are discussed in terms of atoms diffusion on the surface and the chemical composition of the Ag-C films.</Abstract> <Access xmlns="http://purl.org/coar/access_right" > </Access> </Publication> -1
score 13.394457
Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering
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