En la presente tesis se investiga la influencia del tratamiento térmico en la probabilidad de emisión espontánea, el tiempo de vida radiativa, la composición y la estructura de películas delgadas de nitruro de aluminio dopadas con terbio depositadas sobre substratos de silicio por la técnica de pulverización catódica de radiofrecuencia. La tesis tiene por objetivo aplicar el análisis de Judd-Ofelt usando el espectro de emisión. Sepropone un método que utiliza la intensidad de las bandas de transición del espectro de emisión y las ecuaciones de Judd-Ofelt para calcular las propiedades espectrales: tiempo de vida radiativa, tasa de los canales de transición y probabilidad de emisión espontánea. Usando el software Wolfram Mathematica 9.0 se implementa un programa con el método propuesto. Las películas se trataron térmicamente a 500, 750, 900 y 1000 °C. Se investigaron do...

En este trabajo se describe el método de Swanepoel (1983) [1] y el método propuesto por Guerra J A (2010) [2] para caracterizar películas delgadas usando sólo el espectro de transmitancia óptica. La película es caracterizada al quedar determinadas las constantes ópticas y el espesor. Esta tesis presenta una modificación al método de Guerra, a fin de considerar en los cálculos el efecto de la absorción del substrato. La ecuación de transmitancia del sistema película substrato es descrita y obtenida siguiendo la teoría matricial de sistemas multicapas cuya base se encuentra en la teoría electromagnética. Usando el software Wolfram Mathematica v.8.0 se implementa un programa con el método propuesto en el presente trabajo para substratos absorbentes. Este programa es puesto a prueba usando datos de transmitancia óptica simulados y reales. Las medidas son realizadas usando u...

This thesis investigates the effects of the annealing treatments on the spontaneous emission, radiative lifetime, composition and structure of terbium doped aluminum nitride films deposited on silicon substrates by radio frequency magnetron sputtering. The purpose of this thesis is to determine the Judd-Ofelt intensity parameters from the emission spectrum, in order to calculate the radiative lifetime, branching ratios and spontaneous emission probability. The optimal annealing temperature for the emission of terbium doped aluminum nitride is investigated. The annealing treatment was performed in the temperature range starting from 500 up to 1000°C. Two annealing techniques were investigated: rapid thermal processing and a rather slower quartz tube furnace. Furthermore, two heating approaches were applied: direct heating at 500, 750, 900 and 1000 °C, and multistep heating of 500-750°C...

This thesis investigates the effects of the annealing treatments on the spontaneous emission, radiative lifetime, composition and structure of terbium doped aluminum nitride films deposited on silicon substrates by radio frequency magnetron sputtering. The purpose of this thesis is to determine the Judd-Ofelt intensity parameters from the emission spectrum, in order to calculate the radiative lifetime, branching ratios and spontaneous emission probability. The optimal annealing temperature for the emission of terbium doped aluminum nitride is investigated. The annealing treatment was performed in the temperature range starting from 500 up to 1000°C. Two annealing techniques were investigated: rapid thermal processing and a rather slower quartz tube furnace. Furthermore, two heating approaches were applied: direct heating at 500, 750, 900 and 1000 °C, and multistep heating of 500-750°C...

En este trabajo se describe el método de Swanepoel (1983) [1] y el método propuesto por Guerra J A (2010) [2] para caracterizar películas delgadas usando sólo el espectro de transmitancia óptica. La película es caracterizada al quedar determinadas las constantes ópticas y el espesor. Esta tesis presenta una modificación al método de Guerra, a fin de considerar en los cálculos el efecto de la absorción del substrato. La ecuación de transmitancia del sistema película substrato es descrita y obtenida siguiendo la teoría matricial de sistemas multicapas cuya base se encuentra en la teoría electromagnética. Usando el software Wolfram Mathematica v.8.0 se implementa un programa con el método propuesto en el presente trabajo para substratos absorbentes. Este programa es puesto a prueba usando datos de transmitancia óptica simulados y reales. Las medidas son realizadas usando u...

In the present thesis the optical and light emission properties of two systems consisting of Tb3+ and Yb3+ doped amorphous AlOxNy thin films and Tb3+ doped polycrystalline AlN thin films were analyzed. In the two ions system, to obtain an adequate luminescent emission, commonly a significant effort must be made to find a suitable concentration of dopants and elemental composition of the host material. An interesting and highly efficient method is a combinatorial approach, allowing a high velocity screening of a wider range of properties. In the present work a combinatorial gradient based thin film libraries of amorphous AlOxNy:Yb3+, AlOxNy:Tb3+ and AlOxNy:Tb3+:Yb3+ have been prepared by radio frequency co-sputtering from more than one target. In the prepared libraries, the Tb and Yb concentration range spreads along with the oxygen to nitrogen ratio of the host matrix all over the ...

In the present thesis the optical and light emission properties of two systems consisting of Tb3+ and Yb3+ doped amorphous AlOxNy thin films and Tb3+ doped polycrystalline AlN thin films were analyzed. In the two ions system, to obtain an adequate luminescent emission, commonly a significant effort must be made to find a suitable concentration of dopants and elemental composition of the host material. An interesting and highly efficient method is a combinatorial approach, allowing a high velocity screening of a wider range of properties. In the present work a combinatorial gradient based thin film libraries of amorphous AlOxNy:Yb3+, AlOxNy:Tb3+ and AlOxNy:Tb3+:Yb3+ have been prepared by radio frequency co-sputtering from more than one target. In the prepared libraries, the Tb and Yb concentration range spreads along with the oxygen to nitrogen ratio of the host matrix all over the ...

This thesis investigates the effects of the annealing treatments on the spontaneous emission, radiative lifetime, composition and structure of terbium doped aluminum nitride films deposited on silicon substrates by radio frequency magnetron sputtering. The purpose of this thesis is to determine the Judd-Ofelt intensity parameters from the emission spectrum, in order to calculate the radiative lifetime, branching ratios and spontaneous emission probability. The optimal annealing temperature for the emission of terbium doped aluminum nitride is investigated. The annealing treatment was performed in the temperature range starting from 500 up to 1000°C. Two annealing techniques were investigated: rapid thermal processing and a rather slower quartz tube furnace. Furthermore, two heating approaches were applied: direct heating at 500, 750, 900 and 1000 °C, and multistep heating of 500-750°C...