This Master’s Thesis is devoted to the analysis and design of a control structure for the nanopositioning system LAU based on the dynamic control allocation technique. The objective is to control the vertical displacement with nanometer precision under a control effort distribution criterion among the actuator set. In this case, the pneumatic actuator is used as a passive gravity compensator while the voice coil motor generates the transient forces. The analysis of the system characteristics allows defining the design criterion for the control allocation. In this direction, the proposed dynamic control allocation stage considers a frequency distribution of the control effort. The lower frequency components are assigned to the pneumatic actuator while the higher frequencies are handled by the voice coil drive. The significant actuator dynamics are compensated through a Kalman filter app...

This Master’s Thesis is devoted to the analysis and design of a control structure for the nanopositioning system LAU based on the dynamic control allocation technique. The objective is to control the vertical displacement with nanometer precision under a control effort distribution criterion among the actuator set. In this case, the pneumatic actuator is used as a passive gravity compensator while the voice coil motor generates the transient forces. The analysis of the system characteristics allows defining the design criterion for the control allocation. In this direction, the proposed dynamic control allocation stage considers a frequency distribution of the control effort. The lower frequency components are assigned to the pneumatic actuator while the higher frequencies are handled by the voice coil drive. The significant actuator dynamics are compensated through a Kalman filter app...