Structural and morphological characterization of Fe/Ti superlattices by X-ray reflectivity and high-resolution transmission electron microscopy

• Autores: Yactayo, M., GHANBAJA, Jaafar, Copie, Olivier, Quispe Marcatoma, Justiniano, Landauro, Carlos, Rojas Sánchez, Juan Carlos, Yactayo , M.
• Formato: artículo
• Fecha de Publicación: 2024
• Institución: Universidad Nacional Mayor de San Marcos
• Repositorio: Revistas - Universidad Nacional Mayor de San Marcos
• Lenguaje: español
• OAI Identifier: oai:revistasinvestigacion.unmsm.edu.pe:article/27171
• Enlace del recurso: https://revistasinvestigacion.unmsm.edu.pe/index.php/fisica/article/view/27171
• Nivel de acceso: acceso abierto
• Materia: thin film; nanostructure; structural characterization; morphological characterization; materials science; película delgada; nanoestructura; caracterización estructural; caracterización morfológica; ciencia de los materiales

Multilayers and superlattices consist of stacked thin films made of different materials, including magnetic and non-magnetic ones. These structures are used to produce electronic and spintronic sensors. Thin films are primarily grown using the sputtering technique. This study presents a superlattice with six stacks or periods (N=6) in the nanostructure: Glass/Ti(4.1 nm)/[Fe(2.3 nm)/Ti(1.8 nm)/Fe(2.3 nm)/Ti(4.1 nm)][6] grown by magnetron sputtering. The thickness and roughness of the sample were determined using low-angle X-ray reflectivity (XRR). In addition, a lamella was prepared using focused ion beam (FIB) for morphological analysis by high-resolution transmission electron microscopy (HRTEM). The values obtained from X-ray reflectivity were consistent with those obtained from HRTEM, allowing the growth process optimization of Fe/Ti thin films for the development of new kind of magnetic devices.